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 1. Marketplace
 2. Photoresist
 3. SEMITOOL
 4. SST-221
 5. #9229860


USED SEMITOOL SST-221 #9229860 FOR SALE

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Photoresist
Manufacturer
SEMITOOL
Model
SST-221
 * Equipment Details
 * Model Description

ID: 9229860
Wafer Size: 8"
Spray solvent tool, 8".
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SEMITOOL SST-221 photoresist equipment is a reliable, high-performance solution
for a variety of wafer processing needs. This system delivers a high degree of
uniform and repeatable coating for a wide range of materials. The unit includes
a large selection of coating heads, a programmable power supply, thickness and
temperature controllers, as well as advanced automation features to ensure a
consistent process from wafer to wafer. SST-221 utilizes an electron beam
evaporation source to apply photoresist to the wafer. Electron beam evaporation
offers several advantages over the conventional resistive heating technique
which include improved uniformity, greater stability, and higher deposition
rates. The electron beam source is computer-controlled, allowing precise and
repeatable resist thicknesses. The machine also offers temperature-controlled
spin coat and spin dry portions, enabling the fine tune control of resist
thickness in the final product. SEMITOOL SST-221 is designed for easy
integration into a production environment with powerful automation features.
SST-221 allows for different recipes to be programmed, ensuring the same process
is repeated for each batch of wafers. In addition, the tool is equipped with the
latest safety features, including a secure enclosure for the electron beam
source and a full alarm asset. SEMITOOL SST-221 has proven to be a reliable and
robust tool for a wide variety of industries. It is capable of providing
exceptionally uniform and repeatable photoresist coatings that are essential for
high-precision wafer processing. The model is designed to be integrated into
automated production lines and offers a number of advanced features. With
SST-221 photoresist equipment, you can be sure that your wafers will be
processed with the highest degree of precision and accuracy.
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USED SEMITOOL WST-308M PRODUCTS

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SEMITOOL

WST-308M

Wet Solvent Stripper.
Request Price


SSC

BPE-2708-SP

Gold plating machines, 8" Plating mechanism: Fountain, face-down Manual wafer
load and unload Solution: Non-cyanide, Au solution Solution capacity: (14) Cups
Temperature control: Direct heating Mechanism: PID Control Temperature control
range: Room temperature to ~70°C Flow rate: Auto control by flow sensor, cup /
Pump control mechanism Plating tank: Laminate Upper lid: PVC Cup holder: HT-PVC
and PPS, 8" Upper lid arms: SUS Coated with PTFE Upper lid open / Close: Air
cylinder Fountain pump: Polypropylene Valve: PTFE AV valve, HT-PVC, PVC and PFA
Piping of Au solution: HT-PVC, Polypropylene and PFA Piping of DIW and drain:
HT-PVC, PVC, and PFA Piping of exhaust: PVC Plating unit: PVC Cup location: (7)
Lines x (2) cups Fountain pumps: (14) MD-100FYK with inverter control: 8~50
L/min With cup / Pump flow rate Circulation pumps: (2) MD-100FYK with inverter
control With (2) circulation piping lines Fountain filtration: (14) Sets of PP
(Housing and cartridge) Circulation filtration: (2) sets of PP (Housing and
cartridge) Solution level control: N2 level sensor for each solution tank With
(2) upper, lower, fixed, additive Sensors: Temperature, leakage, flow rate, area
(4) Heaters, 3 kW Power supply: Cabinet (Caster and adjuster) Fixed electrical
current 2-Channel switch: (2) 8~3000 mA (8 ~300 mA) Precision: ±0.5 % by 300 mA
Control: Sequence control Touch panel and PLC Data recorded PC (30) Programmable
numbers (90) Recipes per programmed number Count current mod (mA / Hour) Bump
height uniformity: ≤ 5 % (10-15) points / Wafer Bump height uniformity: ≤ 2 um -
≤3 um, 8" (80-120 points) Flow rate: 35 L/min Edge contact area / Cathode No
plating cup 2006 vintage.
Request Price


KARL SUSS / MICROTEC

ACS 300

(4) Developer track system , 8"-12" (2) 12" loadports 8" loadport Robot (4)
Developer chambers Chamber robot (4) Chillers 2003 vintage.
Request Price


HEADWAY

EC 101

Photoresist coater with 15" diameter bowl with digital control.
Request Price
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