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info@impedans.com
 * Company
 * CSR
 * Contact Us


Impedans
 * Products
   
   * * * SUBSTRATE LEVEL MEASUREMENT
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * Substrate Level Measurement
            * Semion RFEA System
            * Semion 3 keV System
            * Semion Pulsed DC
            * Vertex RFEA System
            * Quantum RFEA System
       
       * RF VOLTAGE-CURRENT (VI) PROBES
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * RF Voltage-Current (VI) Probes
            * Octiv Mono 2.0
            * Octiv Poly 2.0
            * Octiv Suite 2.0
            * Moduli RF Spectrometer
            * Moduli RF Event Detector
            * Alfven
       
       * BULK PLASMA MEASUREMENT
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * Bulk Plasma Measurement
            * Langmuir Probe System
            * Plato Probe System
       
       * VIEW ALL PRODUCTS
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * View All Products
            * Semion RFEA System
            * Semion 3 keV System
            * Semion Pulsed DC System
            * Vertex RFEA System
            * Quantum RFEA System
            * Octiv Mono 2.0
            * Octiv Poly 2.0
            * Octiv Suite 2.0
            * Alfven
            * Moduli RF Event Detector
            * Moduli RF Spectrometer
            * Langmuir Probe System
            * Plato Probe System
 * Applications
   
   * * * SUBSTRATE LEVEL APPLICATIONS
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * Substrate Level Applications
            * Magnetron Sputtering
            * ALD/ALE
            * Commercial Tools
            * Dual Frequency Applications
            * Thrusters
            * Pulsed ICP
            * Process Transfer
       
       * BULK PLASMA APPLICATIONS
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * Bulk Plasma Applications
            * Magnetron Sputtering
            * Pulsed Plasma
            * Atmospheric Plasmas
            * Thrusters
            * Microwave Plasmas
       
       * VI PROBE APPLICATIONS
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * VI Probe Applications
            * Magnetron Sputtering
            * Thrusters
            * Deposition Monitoring
            * Atmospheric Plasmas
            * Pulsed RF
            * Commercial Tools
            * Matchbox Characterisation
       
       * VIEW ALL APPLICATIONS
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * View All Applications
 * Markets
   
   * * * VIEW ALL MARKETS
         
            Do you want to learn more about our sensors? Contact us and a member
            of the team will get back to you.
            
            Contact Us
         
          * View All Markets
            * Semiconductor
            * Vacuum Coating
            * Medical Devices
            * RF Power
            * Aerospace
            * Atmospheric Plasma
            * ALD/ALE
            * Storage & Memory
 * Resources


Search for:
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Search for:
 * ProductsShow sub menu
   * Substrate Level MeasurementShow sub menu
     * Semion RFEA System
     * Semion 3 keV System
     * Semion Pulsed DC
     * Vertex RFEA System
     * Quantum RFEA System
   * RF Voltage-Current (VI) ProbesShow sub menu
     * Octiv Mono 2.0
     * Octiv Poly 2.0
     * Octiv Suite 2.0
     * Moduli RF Spectrometer
     * Moduli RF Event Detector
     * Alfven
   * Bulk Plasma MeasurementShow sub menu
     * Langmuir Probe System
     * Plato Probe System
 * ApplicationsShow sub menu
   * Substrate Level Applications
   * Bulk Plasma Applications
   * VI Probe Applications
 * MarketsShow sub menu
   * Semiconductor
   * RF Power
   * ALD/ALE
   * Aerospace
   * Atmospheric Plasma
   * Medical Devices
   * Storage & Memory
   * Vacuum Coating
 * Resources

 * Company
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advanced RF calibration laboratory


LAB RFX

Learn more
Measure the


IMPOSSIBLE

See more


SUBSTRATE-LEVEL MEASUREMENT

See more


BULK PLASMA MEASUREMENT

See more
advanced RF calibration laboratory


LAB RFX

Learn more
Measure the


IMPOSSIBLE

See more


SUBSTRATE-LEVEL MEASUREMENT

See more


BULK PLASMA MEASUREMENT

See more
advanced RF calibration laboratory


LAB RFX

Learn more
 * 1
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OUR PRODUCTS

SUBSTRATE LEVEL MEASUREMENT

Measure the ion energies and ion flux impacting on your substrate with our RFEAs
- rapidly characterise your plasma chamber under different power, pressure,
frequency and gas flow conditions.

See more

RF VOLTAGE-CURRENT PROBES

Our high performance Octiv VI probe can measure RF power with 1% accuracy, as
well as measure impedance and RF harmonics to get a direct view of your plasma.

See more

BULK PLASMA MEASUREMENTS

Measure the fundamental plasma parameters such as the ion density, electron
temperature and plasma potential with our state-of-the-art Langmuir Probes

See Details

SOFTWARE & RESOURCES

Download the latest software or review our research publications using these
plasma measurement instruments

See Details

APPLICATIONS


ARC DETECTION

The Alfven is designed to detect arcing in RF plasmas with 1 microsecond
resolution.

Read More


PLASMA UNIFORMITY MEASUREMENT

The Langmuir Spatial can map out the ion density with 1 mm resolution across
your plasma chamber, rapidly mapping uniformity under different process
conditions

Read more


MATCHBOX CHARACTERISATION

The Octiv Mono can be used to characterise the power efficiency and impedance
range of match boxes.

RF Matching Network Characterisation


THIN FILM PROCESS TRANSFER

The Quantum RFEA is a hybrid between an ion energy analyser and quartz crystal
microbalance, enabling it to directly measure the ion/neutral ratio impacting a
substrate surface. This is one of the key parameters for transferring thin film
processes between different tools.

Read more

ARC DETECTION

Learn more about arc detection

PLASMA UNIFORMITY MEASUREMENT

Read more about the Langmuir Spatial

MATCHBOX CHARACTERISATION

Learn more about Match Box Characterisation

THIN FILM PROCESS TRANSFER

Learn more about the Quantum RFEA

ARC DETECTION

Learn more about arc detection

PLASMA UNIFORMITY MEASUREMENT

Read more about the Langmuir Spatial

MATCHBOX CHARACTERISATION

Learn more about Match Box Characterisation

THIN FILM PROCESS TRANSFER

Learn more about the Quantum RFEA

ARC DETECTION

Learn more about arc detection

PLASMA UNIFORMITY MEASUREMENT

Read more about the Langmuir Spatial

MATCHBOX CHARACTERISATION

Learn more about Match Box Characterisation

THIN FILM PROCESS TRANSFER

Learn more about the Quantum RFEA

 * 1
 * 2
 * 3
 * 4

Intelligent Sensors for RF & Plasma Processing

Impedans provide you with intelligent sensing platforms for radio-frequency (RF)
and plasma process monitoring. Our products find applications in fundamental
research, process development, tool design, process control and fault detection
and classification (FDC). We serve a wide range of industries, due to the
ubiquitous nature of RF and plasma processing, such as semiconductor, vacuum
coating, medical device, hard disk and aerospace among many others.

What Our Clients Say

“Impedans provide exciting instruments to measure plasma. I very much look
forward to their product updates.”

Dr. Vitezslav Stranak, Institute of Physics | University of Greifswald, Germany

“Impedans provides unique products, timely support, and always welcome
customer’s feedback to further improve their product. It is a delight to work
with Impedans’ development team”   

Samer Bana, Head of Engineering Logic Conductor Etch | Applied Materials, USA  

“Impedans have been superb. Their customer service is great. The guys there
respond very quickly”

Dr. Pedro Costa, Pinto Senior Division Member | Technology Department, CERN,
Switzerland

“I would recommend Impedans to anyone seeking plasma measurement systems”

Prof Richard van de Sanden, Director | Dutch Institute for Fundamental Energy
Research, The Netherlands

“Impedans are a pleasure to work with. They are friendly, accommodating and
patient”

Dr. Jean-Francois de Marneffe, Senior Process Engineer | IMEC, Belgium

“The Semion system together with Impedans’ friendly and immediate customer
service – an effective team for plasma analysis”

Dr. Thomas Plach, EV Group | Austria

“Impedans provide an excellent product and their customer service is great”

Dr. Cormac Corr, Plasma Research Laboratory | Australian National University,
Australia

“Impedans are a pleasure to work with. The excellent customer service makes a
real difference to me”

Dr. Mark Bowden, Senior Lecturer in Physics | The Open University, UK

“Impedans provide exciting instruments to measure plasma. I very much look
forward to their product updates.”

Dr. Vitezslav Stranak, Institute of Physics | University of Greifswald, Germany

“Impedans provides unique products, timely support, and always welcome
customer’s feedback to further improve their product. It is a delight to work
with Impedans’ development team”   

Samer Bana, Head of Engineering Logic Conductor Etch | Applied Materials, USA  

“Impedans have been superb. Their customer service is great. The guys there
respond very quickly”

Dr. Pedro Costa, Pinto Senior Division Member | Technology Department, CERN,
Switzerland

“I would recommend Impedans to anyone seeking plasma measurement systems”

Prof Richard van de Sanden, Director | Dutch Institute for Fundamental Energy
Research, The Netherlands

“Impedans are a pleasure to work with. They are friendly, accommodating and
patient”

Dr. Jean-Francois de Marneffe, Senior Process Engineer | IMEC, Belgium

“The Semion system together with Impedans’ friendly and immediate customer
service – an effective team for plasma analysis”

Dr. Thomas Plach, EV Group | Austria

“Impedans provide an excellent product and their customer service is great”

Dr. Cormac Corr, Plasma Research Laboratory | Australian National University,
Australia

“Impedans are a pleasure to work with. The excellent customer service makes a
real difference to me”

Dr. Mark Bowden, Senior Lecturer in Physics | The Open University, UK

“Impedans provide exciting instruments to measure plasma. I very much look
forward to their product updates.”

Dr. Vitezslav Stranak, Institute of Physics | University of Greifswald, Germany
BROWSE BY SECTOR
Semiconductor
Vacuum Coating
Medical Devices
RF Power
Aerospace
Atmospheric Plasma
ALD / ALE
Storage & Memory
Talk to Us Today

Do you want to learn more about our sensors or applications? Contact us and a
member of the team will get back to you

Contact us
Products
 * Substrate Level Measurement
 * RF Voltage-Current (VI) Probes
 * Bulk Plasma Measurement

Applications
 * RFEA Applications
 * VI Probe Applications
 * Langmuir Applications
 * All Applications

 * Lab RFx
 * Resources
 * Browse by Markets

 * Contact
 * Privacy Policy

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