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Text Content

 * Support
    * Overview
    * Resource Library
    * Request a Quote
    * RMA Request Form
    * EUD Request Form
    * Demo Request
    * Service Request
    * Safety Data Sheets
    * Technical Support Request

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Contact
   
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 * Components
   
   
   HELIUM LEAK DETECTION
   
    * Helium Leak Detectors
   
   
   PUMPS
   
    * Dry Pumps
    * Small Dry Pumps
    * Mechanical Booster Pumps
    * Rotary Vane Pumps
    * Rotary Piston Pumps
    * Oil Diffusion Pumps
   
   
   FILM MEASUREMENT
   
    * Quartz Crystal Monitor
    * Spectroscopic Ellipsometry
    * Copper Film Measurement System
   
   
   GAUGES
   
    * Extremely High Vacuum Gauges
    * Ionization Gauges
    * Pirani Gauges
    * Gauge Displays
    * Capacitance Manometers
   
   
   RESIDUAL GAS ANALYZERS
   
   
 * Systems
   
   
   PLASMA ASHING
   
    * Enviro
    * Luminous NA
   
   
   ETCHING
   
    * Multifilm
    * Deep Oxide Etching
    * RISE System
   
   
   PVD
   
    * Cluster Systems
    * Roll-coater
    * In-line Systems
    * R&D
    * 300mm
   
   
   VACUUM DISTILLATION
   
    * Centrifugal Type
   
   
   EVAPORATION
   
   
   ION IMPLANTER
   
   
   VACUUM FURNACES
   
   
   CVD
   
   
   FREEZE DRYING
   
   
   VACUUM COOLING
   
   
 * Markets
   
   
   SEMICONDUCTOR
   
    * Non-Volatile Memory
    * Copper Interconnects
    * Compound Semi
   
   
   MEMS/IOT
   
    * MEMS Fabrication
    * Piezoelectrics
   
   
   LED
   
    * GAN Devices
    * ITO
   
   
   POWER DEVICE
   
    * SiC
   
   
   SECONDARY BATTERY
   
   
   ADVANCED PACKAGING
   
   
   FOOD INDUSTRY
   
   
   AUTOMOTIVE
   
   
   SOLAR
   
   
   PHARMACEUTICALS
   
   
   OPTICAL DEVICES
   
   
 * Services
    * Overview
    * First American Financing
    * Heliot Repair
    * Vacuum Pump Repair
    * MEMS Foundry
    * Shield Cleaning
    * Speciality Materials
    * Targets
    * Refurbished Equipment
    * International Service
   
   
   SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR
   NEXT-GENERATION PRODUCT PRODUCTION

 * About ULVAC
    * Overview
    * News & Events
    * Environmental
    * International Offices
    * Investors
    * Social Responsibility
    * Careers
    * Quality Statement
    * Vacuum Magazine
   
   
   SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR
   NEXT-GENERATION PRODUCT PRODUCTION

 * Contact

 * Component Category
   * Back
   * Helium Leak Detection
     * Back
     * Helium Leak Detectors
   * Pumps
     * Back
     * Dry Pumps
     * Small Dry Pumps
     * Mechanical Booster Pumps
     * Rotary Vane Pumps
     * Rotary Piston Pumps
     * Oil Diffusion Pumps
   * Film Measurement
     * Back
     * Quartz Crystal Monitor
     * Spectroscopic Ellipsometry
     * Copper Film Measurement System
   * Gauges
     * Back
     * Extremely High Vacuum Gauges
     * Ionization Gauges
     * Pirani Gauges
     * Gauge Displays
     * Capacitance Manometers
   * Residual Gas Analyzers
     * Back
     * Residual Gas Analyzers
 * Systems
   * Back
   * Plasma Ashing
     * Back
     * Enviro
     * Luminous NA
   * Etching
     * Back
     * Multifilm
     * Deep Oxide Etching
     * RISE System
   * PVD
     * Back
     * Cluster Systems
     * Roll-coater
     * In-line Systems
     * R&D
     * 300mm
   * Vacuum Distillation
     * Back
     * Centrifugal Type
   * Evaporation
     * Back
     * Evaporation Roll Coater
     * R&D/Pilot Production
     * In-line Systems
   * Ion Implanter
     * Back
     * Si Processing
     * SiC
   * Vacuum Furnaces
     * Back
     * Brazing Furnace
     * Vacuum Sintering
     * Vacuum Heat Treatment
     * Vacuum Induction Melting
   * CVD
     * Back
     * Single-Substrate
     * In-line Systems
   * Freeze Drying
     * Back
     * Lyophilizer
   * Vacuum Cooling
     * Back
     * Vacuum Cooling Food
     * Pallet Type
 * Markets
   * Back
   * Semiconductor
     * Back
     * Non-Volatile Memory
     * Copper Interconnects
     * Compound Semi
   * MEMS/IOT
     * Back
     * MEMS Fabrication
     * Piezoelectrics
   * LED
     * Back
     * GAN Devices
     * ITO
   * Power Device
     * Back
     * SiC
   * Secondary Battery
     * Back
     * Thin-Film battery
   * Advanced Packaging
     * Back
     * EMI Shielding
     * Wafer-Level Packaging
     * Panel-Level Packaging
   * Food Industry
     * Back
     * Agriculture
     * VCF Cool and Brine
     * Food Processing
   * Automotive
     * Back
     * Automotive
   * Solar
     * Back
     * Photovoltaic
   * Pharmaceuticals
     * Back
     * Medicine
   * Optical Devices
     * Back
     * Optical Films
 * Services
    * Back
    * Overview
    * First American Financing
    * Heliot Repair
    * Vacuum Pump Repair
    * MEMS Foundry
    * Shield Cleaning
    * Speciality Materials
    * Targets
    * Refurbished Equipment
    * International Service
   
   
   SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR
   NEXT-GENERATION PRODUCT PRODUCTION

 * About ULVAC
    * Back
    * Overview
    * News & Events
    * Environmental
    * International Offices
    * Investors
    * Social Responsibility
    * Careers
    * Quality Statement
    * Vacuum Magazine
   
   
   SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR
   NEXT-GENERATION PRODUCT PRODUCTION

 * Contact
 * Support
    * Back
    * Overview
    * Resource Library
    * Request a Quote
    * RMA Request Form
    * EUD Request Form
    * Demo Request
    * Service Request
    * Safety Data Sheets
    * Technical Support Request





BEST-IN-CLASS ASH RATE

ENVIRO SERIES PLASMA ASHING




SMALL, QUIET, FAST.

Replace your old dry pumps with ULVAC's innovative new screw pump.


SMALLER LEAKS, FASTER.

The Worlds Fastest Pumping Speed for Helium Leak Detectors


BEST-IN-CLASS ASH RATE

Enviro Series Plasma Ashing




SMALL, QUIET, FAST.

Replace your old dry pumps with ULVAC's innovative new screw pump.


SMALLER LEAKS, FASTER.

The Worlds Fastest Pumping Speed for Helium Leak Detectors


ULVAC THE TECHNICAL LEADER

INNOVATIVE SOLUTIONS TO COMPLEX PROBLEMS

DEDICATED TO SOLVING EMERGING TECHNICAL NEEDS AND PROVIDING LONG TERM SUPPORT


 * MEMS/IOT


 * VACUUM COOLING


 * SEMICONDUCTOR


 * THIN-FILM BATTERY


 * FIRST AMERICAN FINANCING


 * LEAK DETECTION


 * VACUUM PUMPS


 * REFURBISHMENT

FEATURED SYSTEM


200MM PVD CLUSTER SYSTEM, MLX-3000.

Best in class PVD system. Designed specifically for 200mm market.




FEATURED PRODUCTS




 * ENVIRO-1XA 2C
   
   Plasma Ashing


 * DIS SERIES
   
   Pumps


 * SME SERIES
   
   PVD


 * QULEE BGM
   
   Residual Gas Analyzers


SUPPORT


 * SPECIALTY SERVICE
   
    * MEMS Foundry
    * Pump Repair
    * Shield Cleaning
    * Refurbished Equipment


 * REQUESTS
   
    * Technical Support
    * Service Parts
    * Service
    * Demo


 * SOLUTIONS
   
    * American Vendor Finance
    * International Offices
    * Request a Product Quote


 * RESOURCE LIBRARY
   
    * Safety Data Sheets
    * News & Events
    * RMA Form
    * End User Declaration

Request RMA Now

"LEADING THE WORLD WITH VACUUM TECHNOLOGY" 

© 2023 ULVAC

401 Griffin Brook Drive, Methuen, MA 01844

   978-686-7550 | Contact ULVAC

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