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 * Products
   * SemDex A
   * SemDex M2
   * SemDex M1
   * Best-Sellers
 * Applications
   * Layer Thickness Si
   * Bow/Warp
   * Bonding Thickness
   * Thin Film
   * Remaining Silicon Thickness
   * TSV Depth
   * Roughness
   * Laser Groove
   * Critical Dimensions UBM
   * Critical Dimensions Shell Elements
 * Technology
   * Spectral Coherence Interferometry
   * Interference Microscopy
   * Reflectometry
 * Company
   * About us
   * Sales & Service
 * Contact
 * English
 * Search
 * 
 * Menu Menu



More than 150 FABs are already equipped with our SemDex Metrology Systems.


FOCUS ON QUALITY



sentronics metrology GmbH offers a unique portfolio of measuring solutions for
the semiconductor industry. With the SemDex Metrology Systems sentronics
metrology provides quality control systems during the entire manufacturing
process for all semiconductor FABs and communicates quality results via SECS/GEM
to the FAB host.


PRODUCTS




Over more than 15 years sentronics metrology has designed and delivered optical
metrology tools for the semiconductor industry.

The products called SemDex are ranging from semi-automated to fully-automated
wafer metrology systems.

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BEST-SELLERS


APPLICATIONS




All applications are wafer level based. Applications are Wafer Bow, Warp and
Flatness, Multilayer Thickness, Thin Film Thickness, Roughness and 2D and 3D
Critical Dimensions of Wafer Level Packaging technologies. Applications cover
all process steps from Wafer Manufacturing, FEOL, BEOL to Wafer Level Packaging.

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TECHNOLOGY




Our technologies are based on optical interferometry and optical reflectometry.
Spectral Coherence Interferometry allows you to measure single and multilayer
thickness and wafer shape. 3D topography gets measured with Interference
Microscopy and thin film layer with Reflectometry.

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COMPANY




sentronics metrology is a successful provider of semi- and fully automated wafer
metrology tools for the semiconductor industry starting from complete
manufacturing processes to advanced packaging.

We are a small and flexible key provider of universal and modular metrology
tools.

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BEST-SELLERS
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CONTACT

sentronics metrology GmbH
Dudenstr. 27-35
68167 Mannheim

Fon: +49 621 84251-0
Fax: +49 621 84251-200
info@sentronics-metrology.de

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