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Skip to the content info@impedans.com * Company * CSR * Contact Us Impedans * Products * * * SUBSTRATE LEVEL MEASUREMENT Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * Substrate Level Measurement * Semion RFEA System * Semion 3 keV System * Semion Pulsed DC * Vertex RFEA System * Quantum RFEA System * RF VOLTAGE-CURRENT (VI) PROBES Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * RF Voltage-Current (VI) Probes * Octiv Mono 2.0 * Octiv Poly 2.0 * Octiv Suite 2.0 * Moduli RF Spectrometer * Moduli RF Event Detector * Alfven * BULK PLASMA MEASUREMENT Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * Bulk Plasma Measurement * Langmuir Probe System * Plato Probe System * VIEW ALL PRODUCTS Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * View All Products * Semion RFEA System * Semion 3 keV System * Semion Pulsed DC System * Vertex RFEA System * Quantum RFEA System * Octiv Mono 2.0 * Octiv Poly 2.0 * Octiv Suite 2.0 * Alfven * Moduli RF Event Detector * Moduli RF Spectrometer * Langmuir Probe System * Plato Probe System * Applications * * * SUBSTRATE LEVEL APPLICATIONS Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * Substrate Level Applications * Magnetron Sputtering * ALD/ALE * Commercial Tools * Dual Frequency Applications * Thrusters * Pulsed ICP * Process Transfer * BULK PLASMA APPLICATIONS Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * Bulk Plasma Applications * Magnetron Sputtering * Pulsed Plasma * Atmospheric Plasmas * Thrusters * Microwave Plasmas * VI PROBE APPLICATIONS Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * VI Probe Applications * Magnetron Sputtering * Thrusters * Deposition Monitoring * Atmospheric Plasmas * Pulsed RF * Commercial Tools * Matchbox Characterisation * VIEW ALL APPLICATIONS Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * View All Applications * Markets * * * VIEW ALL MARKETS Do you want to learn more about our sensors? Contact us and a member of the team will get back to you. Contact Us * View All Markets * Semiconductor * Vacuum Coating * Medical Devices * RF Power * Aerospace * Atmospheric Plasma * ALD/ALE * Storage & Memory * Resources Search for: Close search Search for: * ProductsShow sub menu * Substrate Level MeasurementShow sub menu * Semion RFEA System * Semion 3 keV System * Semion Pulsed DC * Vertex RFEA System * Quantum RFEA System * RF Voltage-Current (VI) ProbesShow sub menu * Octiv Mono 2.0 * Octiv Poly 2.0 * Octiv Suite 2.0 * Moduli RF Spectrometer * Moduli RF Event Detector * Alfven * Bulk Plasma MeasurementShow sub menu * Langmuir Probe System * Plato Probe System * ApplicationsShow sub menu * Substrate Level Applications * Bulk Plasma Applications * VI Probe Applications * MarketsShow sub menu * Semiconductor * RF Power * ALD/ALE * Aerospace * Atmospheric Plasma * Medical Devices * Storage & Memory * Vacuum Coating * Resources * Company * CSR * Contact Us advanced RF calibration laboratory LAB RFX Learn more Measure the IMPOSSIBLE See more SUBSTRATE-LEVEL MEASUREMENT See more BULK PLASMA MEASUREMENT See more advanced RF calibration laboratory LAB RFX Learn more Measure the IMPOSSIBLE See more SUBSTRATE-LEVEL MEASUREMENT See more BULK PLASMA MEASUREMENT See more advanced RF calibration laboratory LAB RFX Learn more * 1 * 2 * 3 * 4 OUR PRODUCTS SUBSTRATE LEVEL MEASUREMENT Measure the ion energies and ion flux impacting on your substrate with our RFEAs - rapidly characterise your plasma chamber under different power, pressure, frequency and gas flow conditions. See more RF VOLTAGE-CURRENT PROBES Our high performance Octiv VI probe can measure RF power with 1% accuracy, as well as measure impedance and RF harmonics to get a direct view of your plasma. See more BULK PLASMA MEASUREMENTS Measure the fundamental plasma parameters such as the ion density, electron temperature and plasma potential with our state-of-the-art Langmuir Probes See Details SOFTWARE & RESOURCES Download the latest software or review our research publications using these plasma measurement instruments See Details APPLICATIONS ARC DETECTION The Alfven is designed to detect arcing in RF plasmas with 1 microsecond resolution. Read More PLASMA UNIFORMITY MEASUREMENT The Langmuir Spatial can map out the ion density with 1 mm resolution across your plasma chamber, rapidly mapping uniformity under different process conditions Read more MATCHBOX CHARACTERISATION The Octiv Mono can be used to characterise the power efficiency and impedance range of match boxes. RF Matching Network Characterisation THIN FILM PROCESS TRANSFER The Quantum RFEA is a hybrid between an ion energy analyser and quartz crystal microbalance, enabling it to directly measure the ion/neutral ratio impacting a substrate surface. This is one of the key parameters for transferring thin film processes between different tools. Read more ARC DETECTION Learn more about arc detection PLASMA UNIFORMITY MEASUREMENT Read more about the Langmuir Spatial MATCHBOX CHARACTERISATION Learn more about Match Box Characterisation THIN FILM PROCESS TRANSFER Learn more about the Quantum RFEA ARC DETECTION Learn more about arc detection PLASMA UNIFORMITY MEASUREMENT Read more about the Langmuir Spatial MATCHBOX CHARACTERISATION Learn more about Match Box Characterisation THIN FILM PROCESS TRANSFER Learn more about the Quantum RFEA ARC DETECTION Learn more about arc detection PLASMA UNIFORMITY MEASUREMENT Read more about the Langmuir Spatial MATCHBOX CHARACTERISATION Learn more about Match Box Characterisation THIN FILM PROCESS TRANSFER Learn more about the Quantum RFEA * 1 * 2 * 3 * 4 Intelligent Sensors for RF & Plasma Processing Impedans provide you with intelligent sensing platforms for radio-frequency (RF) and plasma process monitoring. Our products find applications in fundamental research, process development, tool design, process control and fault detection and classification (FDC). We serve a wide range of industries, due to the ubiquitous nature of RF and plasma processing, such as semiconductor, vacuum coating, medical device, hard disk and aerospace among many others. What Our Clients Say “Impedans provide exciting instruments to measure plasma. I very much look forward to their product updates.” Dr. Vitezslav Stranak, Institute of Physics | University of Greifswald, Germany “Impedans provides unique products, timely support, and always welcome customer’s feedback to further improve their product. It is a delight to work with Impedans’ development team” Samer Bana, Head of Engineering Logic Conductor Etch | Applied Materials, USA “Impedans have been superb. Their customer service is great. The guys there respond very quickly” Dr. Pedro Costa, Pinto Senior Division Member | Technology Department, CERN, Switzerland “I would recommend Impedans to anyone seeking plasma measurement systems” Prof Richard van de Sanden, Director | Dutch Institute for Fundamental Energy Research, The Netherlands “Impedans are a pleasure to work with. They are friendly, accommodating and patient” Dr. Jean-Francois de Marneffe, Senior Process Engineer | IMEC, Belgium “The Semion system together with Impedans’ friendly and immediate customer service – an effective team for plasma analysis” Dr. Thomas Plach, EV Group | Austria “Impedans provide an excellent product and their customer service is great” Dr. Cormac Corr, Plasma Research Laboratory | Australian National University, Australia “Impedans are a pleasure to work with. The excellent customer service makes a real difference to me” Dr. Mark Bowden, Senior Lecturer in Physics | The Open University, UK “Impedans provide exciting instruments to measure plasma. I very much look forward to their product updates.” Dr. Vitezslav Stranak, Institute of Physics | University of Greifswald, Germany “Impedans provides unique products, timely support, and always welcome customer’s feedback to further improve their product. It is a delight to work with Impedans’ development team” Samer Bana, Head of Engineering Logic Conductor Etch | Applied Materials, USA “Impedans have been superb. Their customer service is great. The guys there respond very quickly” Dr. Pedro Costa, Pinto Senior Division Member | Technology Department, CERN, Switzerland “I would recommend Impedans to anyone seeking plasma measurement systems” Prof Richard van de Sanden, Director | Dutch Institute for Fundamental Energy Research, The Netherlands “Impedans are a pleasure to work with. They are friendly, accommodating and patient” Dr. Jean-Francois de Marneffe, Senior Process Engineer | IMEC, Belgium “The Semion system together with Impedans’ friendly and immediate customer service – an effective team for plasma analysis” Dr. Thomas Plach, EV Group | Austria “Impedans provide an excellent product and their customer service is great” Dr. Cormac Corr, Plasma Research Laboratory | Australian National University, Australia “Impedans are a pleasure to work with. The excellent customer service makes a real difference to me” Dr. Mark Bowden, Senior Lecturer in Physics | The Open University, UK “Impedans provide exciting instruments to measure plasma. I very much look forward to their product updates.” Dr. Vitezslav Stranak, Institute of Physics | University of Greifswald, Germany BROWSE BY SECTOR Semiconductor Vacuum Coating Medical Devices RF Power Aerospace Atmospheric Plasma ALD / ALE Storage & Memory Talk to Us Today Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you Contact us Products * Substrate Level Measurement * RF Voltage-Current (VI) Probes * Bulk Plasma Measurement Applications * RFEA Applications * VI Probe Applications * Langmuir Applications * All Applications * Lab RFx * Resources * Browse by Markets * Contact * Privacy Policy Connect With Us Copyright © 2022 Impedans Ltd. 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