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 * Home
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   * Advanced Packaging
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   * Rapid Prototyping / High-Mix Production
   * Photonics
   * Your Dream
 * Products
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 * Technology
   * Miniature E-Beam Columns
   * Parallel, Direct-Write
   * Digital Writing System
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   * About
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   * Careers
   * Newsroom
   * Events
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Menu
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 * Applications
   * Advanced Packaging
   * Secure Chip ID
   * Rapid Prototyping / High-Mix Production
   * Photonics
   * Your Dream
 * Products
   * MEBL Platform
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   * Miniature E-Beam Columns
   * Parallel, Direct-Write
   * Digital Writing System
 * Company
   * About
   * Leadership
   * Careers
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HIGH-PRODUCTIVITY MULTICOLUMN E-BEAM LITHOGRAPHY SYSTEMS


WORLD'S FIRST


APPLICATIONS

Previous
Next
VIEW MORE


PRODUCTS

Multicolumn E-Beam Lithography Platform

VIEW MORE


"THE PAST IS PROLOGUE TO THE FUTURE"

PERSONAL NOTE FROM OUR FOUNDER DR. DAVID K. LAM

I am grateful for the opportunities to advance chip making technologies in the
semiconductor industry.  From founding Lam Research in 1980 to develop a
single-wafer, cassette-to-cassette, digital-controlled plasma etch system — to
now leading development of Multibeam’s MEBL platform to deliver a
high-productivity, direct-writing maskless system using multiple miniature
e-beam columns — I have never been more excited about revolutionizing the future
of semiconductor
wafer fabrication.




 CAREERS


 NEWSROOM


 LEADERSHIP


 COMPANY


COMPANY

Multibeam leads with a breakthrough Multicolumn E-Beam Lithography solution for
cost-effective production of leading-edge semiconductors and rapid time to
market.

LEARN MORE


RECENT NEWS
& EVENTS

Previous
 * Mar 19, 2024




MULTIBEAM ACCEPTS 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT AWARDS AT IMAPS DPC
2024

Multibeam President Ken MacWilliams attended the IMAPS Device Packaging
Conference (DPC) in Arizona and joined fellow our 3D InCites community for the
award ceremony.

It’s been a great honor to be recognized with the 2024 Advanced Technology
Enablement Award. Multibeam is proud to be among leaders in community who are
continuously driving new semiconductor manufacturing innovations, especially for
advanced packaging applications.

The Advanced Technology Enablement Awards recognize efforts across the
microelectronics supply chain that contribute to the advancement of the
heterogeneous integration roadmap, including 3D packaging, interposer
integration, fan-out wafer-level packaging, chiplet architectures, materials
development, and full system integration.

Multibeam is addressing the slow cycle times of masked-based lithography
technologies with its multi-column E-beam lithography (MEBL) direct write
solution. This maskless technology enhances multi-die integration with a large
write field, high DoF, ultra-fine resolution, and adaptable writing. Multibeam
makes it possible to pattern more than 10X larger than current interposers,
facilitating wafer-scale integration for processors like HPC, GPUs, and AI
engines. With more than 100X DoF improvement over optical lithography, it
enables advanced 3D structures and high-resolution interconnects, resulting in a
10x-100x increase in chip-to-chip interconnect bandwidth.


Read more
 * Feb 6, 2024




MULTIBEAM WINS 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT AWARDS

Multibeam has been selected as a WINNER of the 2024 3D InCites Advanced
Technology Enablement Awards! (Check out our “Finalist” feature on pg. 29 of the
Yearbook)! We will be at IMAPS DPC in Arizona to accept the award – meet us
there!

The Advanced Technology Enablement Awards recognize efforts across the
microelectronics supply chain that contribute to the advancement of the
heterogeneous integration roadmap, including 3D packaging, interposer
integration, fan-out wafer-level packaging, chiplet architectures, materials
development, and full system integration.

Multibeam is addressing the slow cycle times of masked-based lithography
technologies with its multi-column E-beam lithography (MEBL) solution. This
maskless technology enhances multi-die integration with a large write field,
high DoF, ultra-fine resolution, and adaptable writing. MEBL makes it possible
to pattern more than 10X larger than current interposers, facilitating
wafer-scale integration for processors like HPC, GPUs, and AI engines. With more
than 100X DoF improvement over optical lithography, it enables advanced 3D
structures and high-resolution interconnects, resulting in a 10x-100x increase
in chip-to-chip interconnect bandwidth.


Read more
 * Jan 8, 2024




MULTIBEAM SHORTLISTED AS FINALIST FOR 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT
AWARDS

Multibeam has been selected as a finalist in the Advanced Technology Enablement
Award category! (Check out our feature on pg. 29 of the Yearbook)! The Advanced
Technology Enablement Awards recognize efforts across the microelectronics
supply chain that contribute to the advancement of the heterogeneous integration
roadmap, including 3D packaging, interposer integration, fan-out wafer-level
packaging, chiplet architectures, materials development, and full system
integration. We’re thrilled to be recognized by such an innovation-forward org
for the work we’re doing in this space. Stay tuned!


Read more
 * Jan 1, 2024




MULTIBEAM’S FEATURE IN SEMICONDUCTOR DIGEST MAGAZINE

Multibeam Chairman & CEO Dr. David K. Lam shared some insights into what trends
and emerging technologies & processes the semiconductor will likely see flourish
in 2024. Check out his 2024 Outlook: Executive Viewpoint on page 23 of the
November/December 2023 issue!


Read more
 * Apr 24, 2024




SYNOPSYS AND MULTIBEAM ACCELERATE INNOVATION WITH FIRST PRODUCTION-READY E-BEAM
LITHOGRAPHY SYSTEM

Multibeam’s Multicolumn Electron Beam Lithography (MEBL) Systems are integrated
with Synopsys CATS data preparation software, creating an easier and faster path
from chip design to production. 

Using electron beams to produce patterns on silicon wafers, e-beam lithography
enables faster yield ramp since there is no need to wait for a mask to be
manufactured. Additionally, more efficient cycles of learning are realized given
the ability to pattern design iterations across a single wafer.


Read more
 * May 1, 2024




MEMS & SENSORS TECHNICAL CONGRESS – MSTC 2024

Wondering how much further MEMS and Sensors applications can go with Multicolumn
E-Beam Lithography technology? Multibeam will be presenting at the 2024 MEMS &
Sensors Technical Congress in UCLA hosted by SEMI. Multibeam President Ken
MacWilliams will present in Session 4 – MEMS Emerging Technology & Devices, on
Limitless MEMS Design Flexibility and Scale: Advanced Multicolumn E-Beam Litho
for Rapid Fabrication of High-Resolution Sub-Micron Structures. Meet us there!





Los Angeles, CA
Read more
 * Mar 19, 2024




MULTIBEAM ACCEPTS 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT AWARDS AT IMAPS DPC
2024

Multibeam President Ken MacWilliams attended the IMAPS Device Packaging
Conference (DPC) in Arizona and joined fellow our 3D InCites community for the
award ceremony.

It’s been a great honor to be recognized with the 2024 Advanced Technology
Enablement Award. Multibeam is proud to be among leaders in community who are
continuously driving new semiconductor manufacturing innovations, especially for
advanced packaging applications.

The Advanced Technology Enablement Awards recognize efforts across the
microelectronics supply chain that contribute to the advancement of the
heterogeneous integration roadmap, including 3D packaging, interposer
integration, fan-out wafer-level packaging, chiplet architectures, materials
development, and full system integration.

Multibeam is addressing the slow cycle times of masked-based lithography
technologies with its multi-column E-beam lithography (MEBL) direct write
solution. This maskless technology enhances multi-die integration with a large
write field, high DoF, ultra-fine resolution, and adaptable writing. Multibeam
makes it possible to pattern more than 10X larger than current interposers,
facilitating wafer-scale integration for processors like HPC, GPUs, and AI
engines. With more than 100X DoF improvement over optical lithography, it
enables advanced 3D structures and high-resolution interconnects, resulting in a
10x-100x increase in chip-to-chip interconnect bandwidth.


Read more
 * Feb 6, 2024




MULTIBEAM WINS 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT AWARDS

Multibeam has been selected as a WINNER of the 2024 3D InCites Advanced
Technology Enablement Awards! (Check out our “Finalist” feature on pg. 29 of the
Yearbook)! We will be at IMAPS DPC in Arizona to accept the award – meet us
there!

The Advanced Technology Enablement Awards recognize efforts across the
microelectronics supply chain that contribute to the advancement of the
heterogeneous integration roadmap, including 3D packaging, interposer
integration, fan-out wafer-level packaging, chiplet architectures, materials
development, and full system integration.

Multibeam is addressing the slow cycle times of masked-based lithography
technologies with its multi-column E-beam lithography (MEBL) solution. This
maskless technology enhances multi-die integration with a large write field,
high DoF, ultra-fine resolution, and adaptable writing. MEBL makes it possible
to pattern more than 10X larger than current interposers, facilitating
wafer-scale integration for processors like HPC, GPUs, and AI engines. With more
than 100X DoF improvement over optical lithography, it enables advanced 3D
structures and high-resolution interconnects, resulting in a 10x-100x increase
in chip-to-chip interconnect bandwidth.


Read more
 * Jan 8, 2024




MULTIBEAM SHORTLISTED AS FINALIST FOR 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT
AWARDS

Multibeam has been selected as a finalist in the Advanced Technology Enablement
Award category! (Check out our feature on pg. 29 of the Yearbook)! The Advanced
Technology Enablement Awards recognize efforts across the microelectronics
supply chain that contribute to the advancement of the heterogeneous integration
roadmap, including 3D packaging, interposer integration, fan-out wafer-level
packaging, chiplet architectures, materials development, and full system
integration. We’re thrilled to be recognized by such an innovation-forward org
for the work we’re doing in this space. Stay tuned!


Read more
 * Jan 1, 2024




MULTIBEAM’S FEATURE IN SEMICONDUCTOR DIGEST MAGAZINE

Multibeam Chairman & CEO Dr. David K. Lam shared some insights into what trends
and emerging technologies & processes the semiconductor will likely see flourish
in 2024. Check out his 2024 Outlook: Executive Viewpoint on page 23 of the
November/December 2023 issue!


Read more
 * Apr 24, 2024




SYNOPSYS AND MULTIBEAM ACCELERATE INNOVATION WITH FIRST PRODUCTION-READY E-BEAM
LITHOGRAPHY SYSTEM

Multibeam’s Multicolumn Electron Beam Lithography (MEBL) Systems are integrated
with Synopsys CATS data preparation software, creating an easier and faster path
from chip design to production. 

Using electron beams to produce patterns on silicon wafers, e-beam lithography
enables faster yield ramp since there is no need to wait for a mask to be
manufactured. Additionally, more efficient cycles of learning are realized given
the ability to pattern design iterations across a single wafer.


Read more
 * May 1, 2024




MEMS & SENSORS TECHNICAL CONGRESS – MSTC 2024

Wondering how much further MEMS and Sensors applications can go with Multicolumn
E-Beam Lithography technology? Multibeam will be presenting at the 2024 MEMS &
Sensors Technical Congress in UCLA hosted by SEMI. Multibeam President Ken
MacWilliams will present in Session 4 – MEMS Emerging Technology & Devices, on
Limitless MEMS Design Flexibility and Scale: Advanced Multicolumn E-Beam Litho
for Rapid Fabrication of High-Resolution Sub-Micron Structures. Meet us there!





Los Angeles, CA
Read more
 * Mar 19, 2024




MULTIBEAM ACCEPTS 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT AWARDS AT IMAPS DPC
2024

Multibeam President Ken MacWilliams attended the IMAPS Device Packaging
Conference (DPC) in Arizona and joined fellow our 3D InCites community for the
award ceremony.

It’s been a great honor to be recognized with the 2024 Advanced Technology
Enablement Award. Multibeam is proud to be among leaders in community who are
continuously driving new semiconductor manufacturing innovations, especially for
advanced packaging applications.

The Advanced Technology Enablement Awards recognize efforts across the
microelectronics supply chain that contribute to the advancement of the
heterogeneous integration roadmap, including 3D packaging, interposer
integration, fan-out wafer-level packaging, chiplet architectures, materials
development, and full system integration.

Multibeam is addressing the slow cycle times of masked-based lithography
technologies with its multi-column E-beam lithography (MEBL) direct write
solution. This maskless technology enhances multi-die integration with a large
write field, high DoF, ultra-fine resolution, and adaptable writing. Multibeam
makes it possible to pattern more than 10X larger than current interposers,
facilitating wafer-scale integration for processors like HPC, GPUs, and AI
engines. With more than 100X DoF improvement over optical lithography, it
enables advanced 3D structures and high-resolution interconnects, resulting in a
10x-100x increase in chip-to-chip interconnect bandwidth.


Read more
 * Feb 6, 2024




MULTIBEAM WINS 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT AWARDS

Multibeam has been selected as a WINNER of the 2024 3D InCites Advanced
Technology Enablement Awards! (Check out our “Finalist” feature on pg. 29 of the
Yearbook)! We will be at IMAPS DPC in Arizona to accept the award – meet us
there!

The Advanced Technology Enablement Awards recognize efforts across the
microelectronics supply chain that contribute to the advancement of the
heterogeneous integration roadmap, including 3D packaging, interposer
integration, fan-out wafer-level packaging, chiplet architectures, materials
development, and full system integration.

Multibeam is addressing the slow cycle times of masked-based lithography
technologies with its multi-column E-beam lithography (MEBL) solution. This
maskless technology enhances multi-die integration with a large write field,
high DoF, ultra-fine resolution, and adaptable writing. MEBL makes it possible
to pattern more than 10X larger than current interposers, facilitating
wafer-scale integration for processors like HPC, GPUs, and AI engines. With more
than 100X DoF improvement over optical lithography, it enables advanced 3D
structures and high-resolution interconnects, resulting in a 10x-100x increase
in chip-to-chip interconnect bandwidth.


Read more
 * Jan 8, 2024




MULTIBEAM SHORTLISTED AS FINALIST FOR 3D INCITES’ ADVANCED TECHNOLOGY ENABLEMENT
AWARDS

Multibeam has been selected as a finalist in the Advanced Technology Enablement
Award category! (Check out our feature on pg. 29 of the Yearbook)! The Advanced
Technology Enablement Awards recognize efforts across the microelectronics
supply chain that contribute to the advancement of the heterogeneous integration
roadmap, including 3D packaging, interposer integration, fan-out wafer-level
packaging, chiplet architectures, materials development, and full system
integration. We’re thrilled to be recognized by such an innovation-forward org
for the work we’re doing in this space. Stay tuned!


Read more
 * Jan 1, 2024




MULTIBEAM’S FEATURE IN SEMICONDUCTOR DIGEST MAGAZINE

Multibeam Chairman & CEO Dr. David K. Lam shared some insights into what trends
and emerging technologies & processes the semiconductor will likely see flourish
in 2024. Check out his 2024 Outlook: Executive Viewpoint on page 23 of the
November/December 2023 issue!


Read more
Next


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Contact us to learn about our technology and products Multibeam Corporation 3951
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