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Submitted URL: http://ulvac.com/
Effective URL: https://www.ulvac.com/
Submission: On January 28 via manual from US — Scanned from DE
Effective URL: https://www.ulvac.com/
Submission: On January 28 via manual from US — Scanned from DE
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* Support * Overview * Resource Library * Request a Quote * RMA Request Form * EUD Request Form * Demo Request * Service Request * Safety Data Sheets * Technical Support Request * * * * Contact * * * * Components HELIUM LEAK DETECTION * Helium Leak Detectors PUMPS * Dry Pumps * Small Dry Pumps * Mechanical Booster Pumps * Rotary Vane Pumps * Rotary Piston Pumps * Oil Diffusion Pumps FILM MEASUREMENT * Quartz Crystal Monitor * Spectroscopic Ellipsometry * Copper Film Measurement System GAUGES * Extremely High Vacuum Gauges * Ionization Gauges * Pirani Gauges * Gauge Displays * Capacitance Manometers RESIDUAL GAS ANALYZERS * Systems PLASMA ASHING * Enviro * Luminous NA ETCHING * Multifilm * Deep Oxide Etching * RISE System PVD * Cluster Systems * Roll-coater * In-line Systems * R&D * 300mm VACUUM DISTILLATION * Centrifugal Type EVAPORATION ION IMPLANTER VACUUM FURNACES CVD FREEZE DRYING VACUUM COOLING * Markets SEMICONDUCTOR * Non-Volatile Memory * Copper Interconnects * Compound Semi MEMS/IOT * MEMS Fabrication * Piezoelectrics LED * GAN Devices * ITO POWER DEVICE * SiC SECONDARY BATTERY ADVANCED PACKAGING FOOD INDUSTRY AUTOMOTIVE SOLAR PHARMACEUTICALS OPTICAL DEVICES * Services * Overview * First American Financing * Heliot Repair * Vacuum Pump Repair * MEMS Foundry * Shield Cleaning * Speciality Materials * Targets * Refurbished Equipment * International Service SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR NEXT-GENERATION PRODUCT PRODUCTION * About ULVAC * Overview * News & Events * Environmental * International Offices * Investors * Social Responsibility * Careers * Quality Statement * Vacuum Magazine SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR NEXT-GENERATION PRODUCT PRODUCTION * Contact * Component Category * Back * Helium Leak Detection * Back * Helium Leak Detectors * Pumps * Back * Dry Pumps * Small Dry Pumps * Mechanical Booster Pumps * Rotary Vane Pumps * Rotary Piston Pumps * Oil Diffusion Pumps * Film Measurement * Back * Quartz Crystal Monitor * Spectroscopic Ellipsometry * Copper Film Measurement System * Gauges * Back * Extremely High Vacuum Gauges * Ionization Gauges * Pirani Gauges * Gauge Displays * Capacitance Manometers * Residual Gas Analyzers * Back * Residual Gas Analyzers * Systems * Back * Plasma Ashing * Back * Enviro * Luminous NA * Etching * Back * Multifilm * Deep Oxide Etching * RISE System * PVD * Back * Cluster Systems * Roll-coater * In-line Systems * R&D * 300mm * Vacuum Distillation * Back * Centrifugal Type * Evaporation * Back * Evaporation Roll Coater * R&D/Pilot Production * In-line Systems * Ion Implanter * Back * Si Processing * SiC * Vacuum Furnaces * Back * Brazing Furnace * Vacuum Sintering * Vacuum Heat Treatment * Vacuum Induction Melting * CVD * Back * Single-Substrate * In-line Systems * Freeze Drying * Back * Lyophilizer * Vacuum Cooling * Back * Vacuum Cooling Food * Pallet Type * Markets * Back * Semiconductor * Back * Non-Volatile Memory * Copper Interconnects * Compound Semi * MEMS/IOT * Back * MEMS Fabrication * Piezoelectrics * LED * Back * GAN Devices * ITO * Power Device * Back * SiC * Secondary Battery * Back * Thin-Film battery * Advanced Packaging * Back * EMI Shielding * Wafer-Level Packaging * Panel-Level Packaging * Food Industry * Back * Agriculture * VCF Cool and Brine * Food Processing * Automotive * Back * Automotive * Solar * Back * Photovoltaic * Pharmaceuticals * Back * Medicine * Optical Devices * Back * Optical Films * Services * Back * Overview * First American Financing * Heliot Repair * Vacuum Pump Repair * MEMS Foundry * Shield Cleaning * Speciality Materials * Targets * Refurbished Equipment * International Service SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR NEXT-GENERATION PRODUCT PRODUCTION * About ULVAC * Back * Overview * News & Events * Environmental * International Offices * Investors * Social Responsibility * Careers * Quality Statement * Vacuum Magazine SUPPORTING A BROAD RANGE OF INDUSTRIES REQUIRING MATERIALS AND SERVICES FOR NEXT-GENERATION PRODUCT PRODUCTION * Contact * Support * Back * Overview * Resource Library * Request a Quote * RMA Request Form * EUD Request Form * Demo Request * Service Request * Safety Data Sheets * Technical Support Request BEST-IN-CLASS ASH RATE ENVIRO SERIES PLASMA ASHING SMALL, QUIET, FAST. Replace your old dry pumps with ULVAC's innovative new screw pump. SMALLER LEAKS, FASTER. The Worlds Fastest Pumping Speed for Helium Leak Detectors BEST-IN-CLASS ASH RATE Enviro Series Plasma Ashing SMALL, QUIET, FAST. Replace your old dry pumps with ULVAC's innovative new screw pump. SMALLER LEAKS, FASTER. The Worlds Fastest Pumping Speed for Helium Leak Detectors ULVAC THE TECHNICAL LEADER INNOVATIVE SOLUTIONS TO COMPLEX PROBLEMS DEDICATED TO SOLVING EMERGING TECHNICAL NEEDS AND PROVIDING LONG TERM SUPPORT * MEMS/IOT * VACUUM COOLING * SEMICONDUCTOR * THIN-FILM BATTERY * FIRST AMERICAN FINANCING * LEAK DETECTION * VACUUM PUMPS * REFURBISHMENT FEATURED SYSTEM 200MM PVD CLUSTER SYSTEM, MLX-3000. Best in class PVD system. Designed specifically for 200mm market. FEATURED PRODUCTS * ENVIRO-1XA 2C Plasma Ashing * DIS SERIES Pumps * SME SERIES PVD * QULEE BGM Residual Gas Analyzers SUPPORT * SPECIALTY SERVICE * MEMS Foundry * Pump Repair * Shield Cleaning * Refurbished Equipment * REQUESTS * Technical Support * Service Parts * Service * Demo * SOLUTIONS * American Vendor Finance * International Offices * Request a Product Quote * RESOURCE LIBRARY * Safety Data Sheets * News & Events * RMA Form * End User Declaration Request RMA Now "LEADING THE WORLD WITH VACUUM TECHNOLOGY" © 2023 ULVAC 401 Griffin Brook Drive, Methuen, MA 01844 978-686-7550 | Contact ULVAC * * Privacy | Terms of Use